JPH0249709Y2 - - Google Patents
Info
- Publication number
- JPH0249709Y2 JPH0249709Y2 JP11338386U JP11338386U JPH0249709Y2 JP H0249709 Y2 JPH0249709 Y2 JP H0249709Y2 JP 11338386 U JP11338386 U JP 11338386U JP 11338386 U JP11338386 U JP 11338386U JP H0249709 Y2 JPH0249709 Y2 JP H0249709Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- storage jig
- support
- vertical storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 150
- 238000003860 storage Methods 0.000 claims description 41
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 238000000034 method Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11338386U JPH0249709Y2 (en]) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11338386U JPH0249709Y2 (en]) | 1986-07-25 | 1986-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6320428U JPS6320428U (en]) | 1988-02-10 |
| JPH0249709Y2 true JPH0249709Y2 (en]) | 1990-12-27 |
Family
ID=30995137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11338386U Expired JPH0249709Y2 (en]) | 1986-07-25 | 1986-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249709Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0648859Y2 (ja) * | 1989-03-03 | 1994-12-12 | ラムコ株式会社 | ウエハー支持具 |
| JP2014060403A (ja) * | 2013-09-24 | 2014-04-03 | Kokusai Electric Semiconductor Service Inc | 基板保持具及びウェーハ支持方法 |
-
1986
- 1986-07-25 JP JP11338386U patent/JPH0249709Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6320428U (en]) | 1988-02-10 |
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